Plasma polymerization in direct current glow : characterization of plasma-polymerized films of benzene and fluorinated derivatives

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Material Type: 図書
Title: Plasma polymerization in direct current glow : characterization of plasma-polymerized films of benzene and fluorinated derivatives
Author/Editor: 寺境, 光俊
JIKEI, MITSUTOSHI
Author Heading: 寺境, 光俊
JIKEI, MITSUTOSHI
Publication, Distribution, etc.: Microelectronics Technology
Publication Date: 1995
Publication Date (W3CDTF): 1995
Periodical title: Microelectronics Technology
Pages: 471-484
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00014629
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ