Tracking Control by Learning and Its Application to Semiconductor Diffusion Furnace Temperature Control

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Material Type: 図書
Title: Tracking Control by Learning and Its Application to Semiconductor Diffusion Furnace Temperature Control
Author/Editor: 山北, 昌毅
YAMAKITA, MASAKI
Author Heading: 山北, 昌毅
YAMAKITA, MASAKI
Publication, Distribution, etc.: In Telligent Control Systems
Publication Date: 1996
Publication Date (W3CDTF): 1996
Periodical title: In Telligent Control Systems
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00016341
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ