精密工学会監修「次世代精密位置決め技術」(分担)

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Material Type: 図書
Title: 精密工学会監修「次世代精密位置決め技術」(分担)
Author/Editor: 新野, 秀憲
SHINNO, HIDENORI
Author Heading: 新野, 秀憲
SHINNO, HIDENORI
Publication, Distribution, etc.: フジテクノシステム
Publication Date: 2000
Publication Date (W3CDTF): 2000
Alternative Title: Ultraprecision Positioning of the Future(Ed:Japan Society for Precision Engineering)
Periodical title: フジテクノシステム
Pages: 645-657
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00039769
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ