ﾚｰｻﾞｱﾌﾞﾚｰｼｮﾝ法によるbeta-FeSi2薄膜の作製と評価

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Material Type: 図書
Title: ﾚｰｻﾞｱﾌﾞﾚｰｼｮﾝ法によるbeta-FeSi2薄膜の作製と評価
Author/Editor: 掛本, 博文
kakemoto, hirofumi
Author Heading: 掛本, 博文
kakemoto, hirofumi
Publication, Distribution, etc.: ﾚｰｻﾞｰ研究
Publication Date: 2000
Publication Date (W3CDTF): 2000
Periodical title: ﾚｰｻﾞｰ研究
No. or year of volume/issue: 28
Volume: 28
Pages: 108-
ISSN (Periodical Title): ISSN : 0387-0200
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00062956
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ