New Positive-Type Chemically Amplified Photosensitive Poly(phenylene ether): 5 Poly[tert-butyl- a-( 2-hydroxy-3-methylphenoxy)acetate-co-2,6-dimethylphenol] with Photoacid Generator,

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Material Type: 図書
Title: New Positive-Type Chemically Amplified Photosensitive Poly(phenylene ether): 5 Poly[tert-butyl- a-( 2-hydroxy-3-methylphenoxy)acetate-co-2,6-dimethylphenol] with Photoacid Generator,
Author/Editor: 上田, 充
ueda, mitsuru
Author Heading: 上田, 充
ueda, mitsuru
Publication, Distribution, etc.: Forefront of Lithographic Materials Research
Publication Date: 2001
Publication Date (W3CDTF): 2001
Periodical title: Forefront of Lithographic Materials Research
Pages: 405-410
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00057967
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ