結晶材料の微細加工の微視的な理解のために（物質の構造とプラズマ加工）

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Material Type: 図書
Title: 結晶材料の微細加工の微視的な理解のために（物質の構造とプラズマ加工）
Author/Editor: 入戸野, 修
NITTONO, OSAMU
Author Heading: 入戸野, 修
NITTONO, OSAMU
Publication, Distribution, etc.: 日本機会学会誌
Publication Date: 2001
Publication Date (W3CDTF): 2001
Periodical title: 日本機会学会誌
No. or year of volume/issue: 104 998
Volume: 104
Issue: 998
Pages: 36-39
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00061459
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ