アルミ誘起結晶化法により作製した多結晶シリコン薄膜の組織

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Material Type: 文書・図像類
Title: アルミ誘起結晶化法により作製した多結晶シリコン薄膜の組織
Author/Editor: 高田, 尚記
takata, naoki
Author Heading: 高田, 尚記
takata, naoki
Publication, Distribution, etc.: 九州大学超高圧電顕室
Publication Date: 2004-05
Publication Date (W3CDTF): 2004-05
Periodical title: 九州大学超高圧電顕室研究報告
No. or year of volume/issue: No. 28
Volume: No. 28
Pages: 59-60
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50044273
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ