物体の精密駆動用弾性波デバイス：超音波モータ

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Material Type: 図書
Title: 物体の精密駆動用弾性波デバイス：超音波モータ
Author/Editor: 上羽, 貞行
UEHA, SADAYUKI
Author Heading: 上羽, 貞行
UEHA, SADAYUKI
Publication, Distribution, etc.: オーム社
Publication Date: 2004
Publication Date (W3CDTF): 2004
Periodical title: 弾性波デバイス技術（日本学術振興会弾性波素子技術第150委員会・編）
No. or year of volume/issue: 分担
Volume: 分担
Pages: 385-396
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50142241
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ