硬脆材料の高能率微細加工法

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Material Type: 文書・図像類
Title: 硬脆材料の高能率微細加工法
Author/Editor: 吉野, 雅彦
YOSHINO, MASAHIKO
Author Heading: 吉野, 雅彦
YOSHINO, MASAHIKO
Publication Date: 2006-03
Publication Date (W3CDTF): 2006-03
Periodical title: 2005年度精密工学会春季大会卒論発表会
No. or year of volume/issue: No.
Volume: No.
Pages: 1-
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00228222
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ