ランタン-タンタル混合ドープにより界面電気特性を向上した次世代ジルコニアゲート絶縁膜の創製

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Material Type: 文書・図像類
Title: ランタン-タンタル混合ドープにより界面電気特性を向上した次世代ジルコニアゲート絶縁膜の創製
Author/Editor: 木口, 賢紀
KIGUCHI, TAKANORI
Author Heading: 木口, 賢紀
KIGUCHI, TAKANORI
Publication Date: 2007-01
Publication Date (W3CDTF): 2007-01
Alternative Title: Creation of new lanthanum-tantalum doped zirconia gate dielectrics with improved interface dielectric properties
Periodical title: 財団法人　池谷科学技術振興財団　平成17年度年報
No. or year of volume/issue: 17
Volume: 17
Pages: 132-138
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00236380
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ