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微細同心溝を形成したシリコン基板上におけるカーボンオニオンの潤滑特性

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微細同心溝を形成したシリコン基板上におけるカーボンオニオンの潤滑特性

Material type
記事
Author
稲葉, 武信ほか
Publisher
ニューダイヤモンドフォーラム
Publication date
2007-11
Material Format
Paper
Journal name
第21回ダイヤモンドシンポジウム講演要旨集
Publication Page
p.140-141
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Notes on use

Note (General):

出版タイプ: NAidentifier:oai:t2r2.star.titech.ac.jp:50039614

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    Paper
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Paper

Material Type
記事
Author/Editor
稲葉, 武信
inaba, takenobu
平田, 敦
HIRATA, ATSUSHI
Publication, Distribution, etc.
Publication Date
2007-11
Publication Date (W3CDTF)
2007-11
Periodical title
第21回ダイヤモンドシンポジウム講演要旨集
Pages
140-141
Text Language Code
jpn