スパッタリング法による圧電薄膜の作製と評価

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Material Type: 図書
Title: スパッタリング法による圧電薄膜の作製と評価
Author/Editor: 脇谷, 尚樹
Wakiya, Naoki
鈴木, 久男
Suzuki, Hisao
篠崎, 和夫
SHINOZAKI, KAZUO
Author Heading: 脇谷, 尚樹
Wakiya, Naoki
鈴木, 久男
Suzuki, Hisao
篠崎, 和夫
SHINOZAKI, KAZUO
Publication, Distribution, etc.: 技術情報協会
Publication Date: 2007
Publication Date (W3CDTF): 2007
Periodical title: セラミックス製造プロセス、応用技術大全集
Pages: 571-581
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50078443
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ