Self-Running Non-Contact Ultrasonically Levitated Stages (分担）

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Material Type: 図書
Title: Self-Running Non-Contact Ultrasonically Levitated Stages (分担）
Author/Editor: 小山, 大介
KOYAMA, Daisuke
中村, 健太郎
NAKAMURA, KENTARO
Author Heading: 小山, 大介
KOYAMA, Daisuke
中村, 健太郎
NAKAMURA, KENTARO
Publication, Distribution, etc.: Springer
Publication Date: 2010-01
Publication Date (W3CDTF): 2010-01
Periodical title: Next-Generation Actuators Leading Breakthroughs
Pages: 401-412
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50098094
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ