Precise Position Stages Using Pneumatically Driven Bellows Actuator and Cylinder Equipped with Air Bearings

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Material Type: 図書
Title: Precise Position Stages Using Pneumatically Driven Bellows Actuator and Cylinder Equipped with Air Bearings
Author/Editor: 川嶋, 健嗣
Kawashima, Kenji
藤田, 壽憲
FUJITA, TOSHINORI
Author Heading: 川嶋, 健嗣
Kawashima, Kenji
藤田, 壽憲
FUJITA, TOSHINORI
Publication, Distribution, etc.: Springer
Publication Date: 2010-01
Publication Date (W3CDTF): 2010-01
Periodical title: Next-Generation Actuators Leading Breakthroughs
Pages: 67-77
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50098961
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ