“TiO2系透明導電膜のスパッタ成膜技術と低抵抗化” 光学薄膜の最適設計・成膜技術と膜厚・膜質・光学特性の制御

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Material Type: 図書
Title: “TiO2系透明導電膜のスパッタ成膜技術と低抵抗化” 光学薄膜の最適設計・成膜技術と膜厚・膜質・光学特性の制御
Author/Editor: 一杉, 太郎
Hitosugi, Taro
Author Heading: 一杉, 太郎
Hitosugi, Taro
Publication, Distribution, etc.: 技術情報協会
Publication Date: 2013
Publication Date (W3CDTF): 2013
Pages: 358-366
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50334682
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ