Chaper 9: Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte

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Material Type: 図書
Title: Chaper 9: Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte
Author/Editor: 曽根, 正人
Sone, Masato
清水, 哲也
unknown, unknown
篠田, 奈緒
Shinoda, Nao
TSO-FU, MARK CHANG
Chang, Mark
Author Heading: 曽根, 正人
Sone, Masato
清水, 哲也
unknown, unknown
篠田, 奈緒
Shinoda, Nao
TSO-FU, MARK CHANG
Chang, Mark
Publication, Distribution, etc.: INTECH
Publication Date: 2015-12
Publication Date (W3CDTF): 2015-12
Periodical title: Electroplating of Nanostructure
Pages: 189-210
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50266370
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ