A study on characterization of doping profile in semiconductor devices

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Material Type: 博士論文
Title: A study on characterization of doping profile in semiconductor devices
Author/Editor: 藪原, 秀彦
Yabuhara, Hidehiko
Author Heading: 藪原, 秀彦
Yabuhara, Hidehiko
Publication Date: 2016-09
Publication Date (W3CDTF): 2016-09
Degree grantor/type: 東京工業大学
Date Granted: 2016-09-20
Dissertation Number: 甲第10344号
Degree Type: 博士（工学）
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50318758
Format (IMT): application/pdf
Source: http://t2r2.star.titech.ac.jp/rrws/file/CTT100712131/ATD100000413/thesis_14D36087_藪原秀彦.pdf （fulltext）
http://t2r2.star.titech.ac.jp/rrws/file/CTT100712131/ATD100000413/thesis_14D36087_%E8%97%AA%E5%8E%9F%E7%A7%80%E5%BD%A6.pdf
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ