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超極細電子線によるコヒーレント照射顕微法の実証研究

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超極細電子線によるコヒーレント照射顕微法の実証研究

Material type
記事
Author
澁谷, 達則ほか
Publisher
-
Publication date
2017-03
Material Format
Digital
Journal name
-
Publication Page
-
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Notes on use

Note (General):

identifier:oai:t2r2.star.titech.ac.jp:50359994

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  • Tokyo Tech Research Repository

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Digital

Material Type
記事
Author/Editor
澁谷, 達則
Shibuya, Tatsunori
Publication Date
2017-03
Publication Date (W3CDTF)
2017
Alternative Title
Coherent Microscopy based on Ultra-fine Electron Beam
Degree grantor/type
東京工業大学
Dissertation Number
12608A10494
Degree Type
博士(工学)