DLC成膜技術と工業的応用

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Material Type: 文書・図像類
Title: DLC成膜技術と工業的応用
Author/Editor: 大竹, 尚登
OHTAKE, NAOTO
Author Heading: 大竹, 尚登
OHTAKE, NAOTO
Publication, Distribution, etc.: 日刊工業新聞社
Publication Date: 2019-11
Publication Date (W3CDTF): 2019-11
Periodical title: 日刊工業新聞
No. or year of volume/issue: No. 23255
Volume: No. 23255
Text Language Code: jpn
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50496508
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ