スピンスプレー反応制御と90℃以下の後処理により作製した機能性酸化物膜のフレキシブルセンサ応用
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- Material Type
- 博士論文
- Author/Editor
- 新田, 亮介Nitta, Ryosuke
- Author Heading
- Publication Date
- 2022-03
- Publication Date (W3CDTF)
- 2022-03
- Alternative Title
- Flexible Sensors Utilizing Functionalized Oxide Films Fabricated by Controlling Spin-spray Reactions and Post-treatment below 90℃
- Degree grantor/type
- 東京工業大学
- Date Granted
- 2022-03-26
- Dissertation Number
- 甲第11784号