UV-LIGAによる電界共役流体マイクロ液圧源の開発とその応用

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Material Type: 文書・図像類
Title: UV-LIGAによる電界共役流体マイクロ液圧源の開発とその応用
Author/Editor: 韓, 冬
Han, Dong
吉田, 和弘
YOSHIDA, KAZUHIRO
金, 俊完
KIM, Joon-wan
Author Heading: 韓, 冬
Han, Dong
吉田, 和弘
YOSHIDA, KAZUHIRO
金, 俊完
KIM, Joon-wan
Publication, Distribution, etc.: 一般社団法人日本フルードパワーシステム学会
Publication Date: 2022-05
Publication Date (W3CDTF): 2022-05
Alternative Title: ECF micro hydraulic pressure source by UV-LIGA and its application
Periodical title: 機能性流体テクノロジーの次世代FPSへの展開に関する研究委員会研究成果報告書
Pages: 11-14
Text Language Code: jpn
Subject Heading: Electro-Conjugate fluid(ECF), Micropumps, Hydraulics, Microfinger, Microhand
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50617141
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ