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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 韓, 冬Han, Dong吉田, 和弘YOSHIDA, KAZUHIRO金, 俊完KIM, Joon-wan
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2022-05
- Publication Date (W3CDTF)
- 2022-05
- Alternative Title
- ECF micro hydraulic pressure source by UV-LIGA and its application
- Periodical title
- 機能性流体テクノロジーの次世代FPSへの展開に関する研究委員会 研究成果報告書
- Pages
- 11-14