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Study on Silicon Capacitive Microsensors and Electorostatic Microactuators:Towards a Micro Electro Mechanical System(MEMS)(シリコン静電容量形マクロセンサと静電マイクロアクチュエータの研究:微小電気機械システム(MEMS)の実現へ向って)

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Study on Silicon Capacitive Microsensors and Electorostatic Microactuators:Towards a Micro Electro Mechanical System(MEMS)(シリコン静電容量形マクロセンサと静電マイクロアクチュエータの研究:微小電気機械システム(MEMS)の実現へ向って)

Material type
文書・図像類
Author
鈴木, 健一郎
Publisher
-
Publication date
1993
Material Format
Digital
Capacity, size, etc.
-
NDC
-
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application/pdf博士学位論文の要旨及び審査結果の要旨 (Summary of Thesis(DR))288875 bytes...

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  • Tohoku University Repository（TOUR）

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Digital

Material Type
文書・図像類
Title
Study on Silicon Capacitive Microsensors and Electorostatic Microactuators:Towards a Micro Electro Mechanical System(MEMS)(シリコン静電容量形マクロセンサと静電マイクロアクチュエータの研究:微小電気機械システム(MEMS)の実現へ向って)
Author/Editor
鈴木, 健一郎
Author Heading
鈴木, 健一郎
Publication Date
1993
Publication Date (W3CDTF)
1993
No. or year of volume/issue
1394
Issue
1394
Text Language Code
jpn
Target Audience
一般