金属の触媒作用を用いたシリコンMOS構造の低温形成
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- Material Type
- 博士論文
- Author/Editor
- 湯浅, 俊郎
- Author Heading
- 湯浅, 俊郎 ユアサ, トシロウ
- Alternative Title
- Low Temperature Formation of Si-based MOS Structure by Use of Catalytic Activity of a Metal Layer
- Degree grantor/type
- 大阪大学
- Date Granted
- 2000-03-24
- Dissertation Number
- 甲第07541号
- Degree Type
- 博士(工学)
- Text Language Code
- und