Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses

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Summary, etc.：: To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL pulses having a wavelength of 13.9 nm and duration...

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Material Type: 文書・図像類
Title: Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses
Author/Editor: 石野, 雅彦
市丸, 智
錦野, 将元
長谷川, 登
畑山, 雅俊
河内, 哲哉
奥, 哲
石野雅彦
錦野将元
長谷川登
河内哲哉
Author Heading: 石野, 雅彦
市丸, 智
錦野, 将元
長谷川, 登
畑山, 雅俊
河内, 哲哉
奥, 哲
石野雅彦
錦野将元
長谷川登
河内哲哉
Publication Date: 2016-05-20
Publication Date (W3CDTF): 2016-05-20
Text Language Code: eng
Target Audience: 一般
Note (General): XOPT(X線光学素子、検出器光源とその応用に関する国際会議)
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 国立研究開発法人量子科学技術研究開発機構 : 量子科学技術研究開発機構学術機関リポジトリ