Numerical analysis of particle emission from laser irradiated tin targets for the optimization of the EUV source

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Summary, etc.：: Optimization pre-plasma is critical to obtain high output power from the laser pumped plasma (LPP) extreme ultra-violet (EUV) light source. We investi...

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Material Type: 文書・図像類
Title: Numerical analysis of particle emission from laser irradiated tin targets for the optimization of the EUV source
Author/Editor: 佐々木, 明
砂原淳
古河裕之
西原功修
西川亘
佐々木明
Author Heading: 佐々木, 明
砂原淳
古河裕之
西原功修
西川亘
佐々木明
Publication Date: 2017-03-01
Publication Date (W3CDTF): 2017-03-01
Text Language Code: eng
Target Audience: 一般
Note (General): SPIE Advanced Lithography会議、参加とポスター発表
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 国立研究開発法人量子科学技術研究開発機構 : 量子科学技術研究開発機構学術機関リポジトリ