EUV laser irradiation system with intensity monitor

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Summary, etc.：: In presentation, we report on development of an extreme ultraviolet (EUV) laser irradiation system at QST. EUV laser has a wavelength of 13.9 nm, and ...

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Material Type: 文書・図像類
Title: EUV laser irradiation system with intensity monitor
Author/Editor: 石野, 雅彦
タンフン, ヂン
長谷川, 登
Sakaue, Kazuyuki
Higashiguchi, Takeshi
Ichimaru, Satoshi
Hatayama, Masataka
Washio, Masakazu
Nishikino, Masaharu
Kawachi, Tetsuya
石野雅彦
タンフンヂン
長谷川登
錦野将元
河内哲哉
Author Heading: 石野, 雅彦
タンフン, ヂン
長谷川, 登
Sakaue, Kazuyuki
Higashiguchi, Takeshi
Ichimaru, Satoshi
Hatayama, Masataka
Washio, Masakazu
Nishikino, Masaharu
Kawachi, Tetsuya
石野雅彦
タンフンヂン
長谷川登
錦野将元
河内哲哉
Publication Date: 2018-10-09
Publication Date (W3CDTF): 2018-10-09
Text Language Code: eng
Target Audience: 一般
Note (General): 16th International Conference on X-Ray Lasers (ICXRL 2018)
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 国立研究開発法人量子科学技術研究開発機構 : 量子科学技術研究開発機構学術機関リポジトリ