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文書・図像類

Extended Incident-Angle Dependence Formula of Sputter Yield

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Extended Incident-Angle Dependence Formula of Sputter Yield

Material type
文書・図像類
Author
ONO, Tadayoshiほか
Publisher
National Institute for Fusion Science
Publication date
2006-06
Material Format
Digital
Capacity, size, etc.
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Detailed bibliographic record

Summary, etc.：

We extend a new semi-empirical formula for incident-angle dependence of normalized sputter yield that includes the contribution to sputter yield from ...

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Bibliographic Record

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Digital

Material Type
文書・図像類
Title
Extended Incident-Angle Dependence Formula of Sputter Yield
Author/Editor
ONO, Tadayoshi
SHIBATA, K.
KENMOTSU, Takahiro
MURAMOTO, T.
LI C, Z.
KAWAMURA, Takaichi
Author Heading
ONO, Tadayoshi
SHIBATA, K.
KENMOTSU, Takahiro
MURAMOTO, T.
LI C, Z.
KAWAMURA, Takaichi
Publication, Distribution, etc.
National Institute for Fusion Science
Publication Date
2006-06
Publication Date (W3CDTF)
2006-06
Periodical title
Research Report NIFS-Series
ISSN (Periodical Title)
ISSN : 0915-6364
Text Language Code
eng