BEHAVIOUR OF IONS IN AN RF PLASMA

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Summary, etc.：: The design and the construction of the electrostatic energy analyzer for low energy of about 10 eV charged particles (resolution is 170), and the quad...

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Material Type: 博士論文
Title: BEHAVIOUR OF IONS IN AN RF PLASMA
Author/Editor: 岡本, 幸雄
OKAMOTO, Yukio
Author Heading: 岡本, 幸雄
OKAMOTO, Yukio
Publication Date: 1971-06-14
Publication Date (W3CDTF): 1971-06-14
Alternative Title: 高周波プラズマ中のイオンの挙動
Degree grantor/type: 名古屋大学
Date Granted: 1971-06-14
Dissertation Number: 甲第655号
Degree Type: 工学博士
Text Language Code: eng
Target Audience: 一般
Note (General): 名古屋大学博士学位論文学位の種類:工学博士(課程) 学位授与年月日:昭和46年6月14日
Format (IMT): application/pdf
Source: ko0655.pdf （fulltext）
https://nagoya.repo.nii.ac.jp/record/10568/files/ko0655.pdf
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 名古屋大学 : 名古屋大学学術機関リポジトリ