UHF帯プラズマを用いた次世代大口径機能性薄膜プロセスの開発
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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 後藤, 俊夫河野, 明廣堀, 勝伊藤, 昌文寒川, 誠二塚田, 勉
- Publication Date
- 2000-03
- Publication Date (W3CDTF)
- 2000-03
- Text Language Code
- jpn
- Subject Heading
- Target Audience
- 一般
- Note (General)
- 科学研究費補助金 研究種目:基盤研究(A)(2) 課題番号:09355002 研究代表者:後藤 俊夫 研究期間:1997-1999年度