博士論文

Synthesis of hexagonal boron nitride by metalorganic chemical vapor deposition for advanced semiconductor devices

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Synthesis of hexagonal boron nitride by metalorganic chemical vapor deposition for advanced semiconductor devices

Material type
博士論文
Author
YANG, XUほか
Publisher
-
Publication date
2018-09-27
Material Format
Paper
Capacity, size, etc.
-
Name of awarding university/degree
名古屋大学,博士(工学)
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Table of Contents

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  • k12501_summary summary

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abstract
  • k12501_abstract abstract

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Paper

Material Type
博士論文
Author/Editor
YANG, XU
杨, 旭
Author Heading
Publication Date
2018-09-27
Publication Date (W3CDTF)
2018-09-27
Alternative Title
次世代半導体デバイス創成のための有機金属化合物気相成長法による六方晶窒化ホウ素の合成
Degree grantor/type
名古屋大学
Date Granted
2018-09-27
Dissertation Number
甲第12501号