容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究

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Material Type: 博士論文
Title: 容量結合型プラズマ中における高アスペクト比ホール底部のチャージアップ挙動に関する研究
Author/Editor: 森山, 誠
Author Heading: 森山, 誠
Publication Date: 2021-03-25
Publication Date (W3CDTF): 2021-03-25
Alternative Title: Study on the charge-up behavior at the bottom of high-aspect ratio holes in a capacitively coupled plasma
Degree grantor/type: 名古屋大学
Date Granted: 2021-03-25
Dissertation Number: 甲第13609号
Degree Type: 博士(工学)
Text Language Code: jpn
Target Audience: 一般
Format (IMT): application/pdf
Source: fulltext
https://nagoya.repo.nii.ac.jp/record/2000420/files/k13609_thesis.pdf
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 名古屋大学 : 名古屋大学学術機関リポジトリ