Deposition of Aluminum-Doped ZnO Films by ICP-Assisted Sputtering

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Note (General)：: Springer Series in Materials Science, 180, pp.125-148; 2014

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Material Type: 図書
Title: Deposition of Aluminum-Doped ZnO Films by ICP-Assisted Sputtering
Author/Editor: Matsuda, Yoshinobu
Hirashima, Akinori
Mine, Kenji
Hashimoto, Takuhiro
Matsuoka, Daichi
Shinohara, Masanori
Okada, Tatsuo
Author Heading: Matsuda, Yoshinobu
Hirashima, Akinori
Mine, Kenji
Hashimoto, Takuhiro
Matsuoka, Daichi
Shinohara, Masanori
Okada, Tatsuo
Publication, Distribution, etc.: Springer India
Publication Date: 2013-09-23
Publication Date (W3CDTF): 2013-09-23
Periodical title: Springer Series in Materials Science
No. or year of volume/issue: 180
Volume: 180
Pages: 125-148
Text Language Code: eng
Target Audience: 一般
Note (General): Springer Series in Materials Science, 180, pp.125-148; 2014
Format (IMT): application/pdf
Source: SSMS180_125.pdf
https://nagasaki-u.repo.nii.ac.jp/record/5044/files/SSMS180_125.pdf
Access Restrictions: 限定公開
Rights (production): c Springer India 2014.
The final publication is available at link.springer.com
Is Version Of (DOI): 10.1007/978-81-322-1160-0_6
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 長崎大学 : 長崎大学学術研究成果リポジトリ