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単結晶Cr電界放出陰極からの単色性電子ビーム放出の実証研究

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単結晶Cr電界放出陰極からの単色性電子ビーム放出の実証研究

Material type
文書・図像類
Author
永井, 滋一
Publisher
三重大学
Publication date
2020-05-15
Material Format
Digital
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application/pdf2018年度~2019年度科学研究費補助金(若手研究)研究成果報告書18K14125

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Summary, etc.:

電子デバイス等の超微細化に伴う,電子ビームを用いた観察・分析装置に高い空間分解能とエネルギー分解能を実現するため,Crを陰極材料に用いた電界放出型電子源を開発し,放出電子のエネルギー幅を評価した。 超高真空下で,タングステン電界放出陰極上形成されたW{113}上の電子放出サイトの形成は,Cr微結晶の...

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Digital

Material Type
文書・図像類
Author/Editor
永井, 滋一
Author Heading
永井, 滋一 ナガイ, シゲカズ
Publication, Distribution, etc.
Publication Date
2020-05-15
Publication Date (W3CDTF)
2020-05-15
Alternative Title
Study on monochromatic electron beam emission from single crystalline Cr field emitters
Text Language Code
jpn