ＡｒＦエキシマレーザ照射援用集積回路金属配線電解めっきおよびエッチング加工の研究

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Material Type: 文書・図像類
Title: ＡｒＦエキシマレーザ照射援用集積回路金属配線電解めっきおよびエッチング加工の研究
Author/Editor: カチョーンルンルアン, パナート
Author Heading: カチョーンルンルアン, パナート
https://nrid.nii.ac.jp/ja/nrid/1000060404092
Publication, Distribution, etc.: 九州工業大学
Publication Date: 2010-06-10
Publication Date (W3CDTF): 2010-06-10
Alternative Title: Study on electro plating and etching for metal interconnect in integrated circuit assisted with ArF excimer laser
Text Language Code: jpn
Subject Heading: ナノ･マイクロ加工
ナノ構造作製
光応用加工
Target Audience: 一般
Note (General): 研究期間：2008～2009, 研究種目：若手研究（B）, 科学研究費補助金研究成果報告書
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 九州工業大学 : キューテイカー