高分解能ラザフォード後方散乱法による高誘電率ゲートスタック構造に関する研究
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- Material Type
- 博士論文
- Title Transcription
- コウブンカイノウ ラザフォード コウホウ サンランホウ ニ ヨル コウユウデンリツ ゲート スタック コウゾウ ニ カンスル ケンキュウ
- Author/Editor
- Zhao, Ming
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2008-03-24
- Publication Date (W3CDTF)
- 2008-03-24
- Alternative Title
- Studies on High-k Gate Stacks by High-resolution Rutherford Backscattering Spectroscopy
- Contributor
- 木村, 健二斧, 髙一立花, 明知