博士論文

α-Sicのステップ防御エピタキシャル成長とデバイス応用

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α-Sicのステップ防御エピタキシャル成長とデバイス応用

Material type
博士論文
Author
Kimoto, Tsunenobu
Publisher
Kyoto University
Publication date
1996-03-23
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
京都大学,博士(工学),Doctor of Engineering
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  • Kyoto University Research Information Repository

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Digital

Material Type
博士論文
Author/Editor
Kimoto, Tsunenobu
Author Heading
Publication, Distribution, etc.
Publication Date
1996-03-23
Publication Date (W3CDTF)
1996-03-23
Alternative Title
Step-Controlled Epitaxial Growth of α-Sic and Device Applications
Contributor
松波, 弘之
佐々木, 昭夫
藤田, 茂夫
Degree grantor/type
京都大学