クラスターイオンビーム照射におけるサイズ効果の研究

Name of awarding university/degree: 京都大学,博士(工学),Doctor of Philosophy (Engineering)

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Material Type: 博士論文
Title: クラスターイオンビーム照射におけるサイズ効果の研究
Author/Editor: Ichiki, Kazuya
Author Heading: Ichiki, Kazuya
Publication, Distribution, etc.: 京都大学 (Kyoto University)
Publication Date: 2012-03-26
Publication Date (W3CDTF): 2012-03-26
Alternative Title: Study on Size Effect of Cluster Ion Beam Irradiation
Contributor: 伊藤, 秋男
柴田, 裕実
松尾, 二郎
Degree grantor/type: 京都大学
Date Granted: 2012-03-26
Dissertation Number: 甲第16847号
Degree Type: 博士(工学)
Doctor of Philosophy (Engineering)
Text Language Code: eng
Alias of Author: 市木, 和弥
イチキ, カズヤ
Subject Heading: Gas Cluster Ion Beam
sputtering SIMS
NDC: 500
Target Audience: 一般
DOI: 10.14989/doctor.k16847
Format (IMT): application/pdf
Source: D_Ichiki_Kazuya.pdf （fulltext）
http://repository.kulib.kyoto-u.ac.jp/dspace/bitstream/2433/157578/2/D_Ichiki_Kazuya.pdf
Access Restrictions: インターネット公開
Rights (production): 許諾条件により要旨・本文は2012-09-01に公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 京都大学 : 京都大学学術情報リポジトリ