半導体GaAs結晶成長ならびにデバイスプロセス誘起格子欠陥の低減化に関する研究
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- 中西, 秀男
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 1997-03-24
- Publication Date (W3CDTF)
- 1997-03-24
- Contributor
- 松波 弘之藤田 茂夫石川 順三
- Degree grantor/type
- 京都大学
- Date Granted
- 1997-03-24