大口径化に対応したSiC基板の紫外光支援研磨に関する研究

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Material Type: 文書・図像類
Title: 大口径化に対応したSiC基板の紫外光支援研磨に関する研究
Author/Editor: Sakamoto, Takeshi
Inaki, Takumi
Oda, Kazuaki
峠, 睦
坂本, 武司
稲木, 匠
小田, 和明
Author Heading: Sakamoto, Takeshi
Inaki, Takumi
Oda, Kazuaki
峠, 睦トウゲ, ムツミ
坂本, 武司
稲木, 匠
小田, 和明
峠, 睦
Publication, Distribution, etc.: 熊本大学
Publication Date: 2013-09-20
Publication Date (W3CDTF): 2013-09-20
Alternative Title: Study on ultraviolet-ray assisted polishing of SiC sub strate corresponding to large-diameter
ダイコウケイカニ　タイオウ　シタ SiC キバンノシガイコウシエンケンマニカンスルケンキュウ
Periodical title: 熊本大学総合技術研究会発表要旨
No. or year of volume/issue: 2013
Volume: 2013
Pages: 23-24
Text Language Code: jpn
Subject Heading: SiC
ultraprecission machining
ultraviolet-ray irradiation
XPS
NDC: 507
Target Audience: 一般
Note (General): application/pdf
平成25年度熊本大学総合技術研究会
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 熊本大学 : 熊本大学学術リポジトリ