博士論文

(Mg,Ca)O保護膜を用いたプラズマ放電デバイスの信頼性向上に関する研究

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(Mg,Ca)O保護膜を用いたプラズマ放電デバイスの信頼性向上に関する研究

Material type
博士論文
Author
武田, 英治
Publisher
-
Publication date
2019-09-25
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
神戸大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
武田, 英治
Author Heading
武田, 英治 タケダ, エイジ
Publication Date
2019-09-25
Publication Date (W3CDTF)
2019-09-25
Alternative Title
Development of Highly Reliable Plasma Discharge Devices with (Mg,Ca)O Protective Layers
Degree grantor/type
神戸大学
Date Granted
2019-09-25
Dissertation Number
甲第7602号