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博士論文

IVa族金属系材料の適用による銅配線技術の熱的安定性向上のための基礎的研究

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IVa族金属系材料の適用による銅配線技術の熱的安定性向上のための基礎的研究

Material type
博士論文
Author
吉本, 健一
Publisher
-
Publication date
2000-09-20
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
北見工業大学,博士(工学)
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  • Kitami Institute of Technology Repository

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Digital

Material Type
博士論文
Author/Editor
吉本, 健一
Author Heading
Publication Date
2000-09-20
Publication Date (W3CDTF)
2000-09-20
Degree grantor/type
北見工業大学
Date Granted
2000-09-20
Dissertation Number
10106乙第2号
Degree Type
博士(工学)