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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 村田, 順二服部, 梓
- Publication, Distribution, etc.
- Publication Date
- 2014-01-01
- Publication Date (W3CDTF)
- 2014-01-01
- Alternative Title
- Development of polishing method for next-generation opt-electronic materials producing atomically-smooth surfaces
- Periodical title
- 科学研究費助成事業研究成果報告書 (2014. )
- Pages
- 1-4