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パルスプラズマ化学気相成長法を用いた環境セル透過電子顕微鏡用隔膜の開発

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パルスプラズマ化学気相成長法を用いた環境セル透過電子顕微鏡用隔膜の開発

Material type
文書・図像類
Author
松谷, 貴臣ほか
Publisher
近畿大学
Publication date
2013-01-01
Material Format
Digital
Capacity, size, etc.
-
NDC
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研究種目：基盤研究（C）; 研究期間：2011～2013; 課題番号：23560808; 研究分野：工学 ; 科研費の分科・細目：材料工学・無機材料・物性Research Paperapplication/pdf

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http://kaken.nii.ac.jp/d/r/00411413.ja.html

http://kaken.nii.ac.jp/d/r/10372533.ja.html

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Digital

Material Type
文書・図像類
Title
パルスプラズマ化学気相成長法を用いた環境セル透過電子顕微鏡用隔膜の開発
Author/Editor
松谷, 貴臣
川﨑, 忠寛
Author Heading
松谷, 貴臣
川﨑, 忠寛
Publication, Distribution, etc.
近畿大学
Publication Date
2013-01-01
Publication Date (W3CDTF)
2013-01-01
Alternative Title
Development of Diaphragm for Environmental Cell Transmission Electron Microscope by Pulse Plasma Enhanced Chemical Vapor Deposition
Periodical title
科学研究費助成事業研究成果報告書 (2013. )
Pages
1-5