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Kindai University Academic Resource Repository
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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 松谷, 貴臣川﨑, 忠寛
- Publication, Distribution, etc.
- Publication Date
- 2017
- Publication Date (W3CDTF)
- 2017
- Alternative Title
- Development of magnetic-field and pulsed-plasma-enhanced chemical vapor deposition method to fabricate amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope
- Periodical title
- 科学研究費助成事業研究成果報告書 (2016)
- Pages
- 1-6