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超高感度近接場蛍光熱顕微鏡を用いた熱物性その場測定法の開発

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超高感度近接場蛍光熱顕微鏡を用いた熱物性その場測定法の開発

Material type
文書・図像類
Author
田口, 良広
Publisher
-
Publication date
2010
Material Format
Digital
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-
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-
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Note (General)：

type:textナノデバイスの機能発現には, その構造をナノレベルで解明することが必要不可欠であり, 特にin situでのリアルタイムモニタリングによるプロセス制御は, 機能発現のメカニズム解明のみならず, 結晶成長品質の向上・成長速度の最適化・歩留まりの向上等へと繋がると期待され, ナノレベル...

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科研費研究者番号 : 30433741

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Digital

Material Type
文書・図像類
Title
超高感度近接場蛍光熱顕微鏡を用いた熱物性その場測定法の開発
Author/Editor
田口, 良広
Author Heading
田口, 良広
Publication Date
2010
Publication Date (W3CDTF)
2010
Alternative Title
チョウコウカンド キンセツバ ケイコウネツ ケンビキョウ オ モチイタ ネツブッセイ ソノバ ソクテイホウ ノ カイハツ
Chokokando kinsetsuba keikonetsu kenbikyo o mochiita netsubussei sonoba sokuteiho no kaihatsu
Development of high-sensitivity near-field fluorescence thermal nanoscopy for in-situ measurement of thermophysical properties
Periodical title
科学研究費補助金研究成果報告書
Text Language Code
jpn
Subject Heading
近接場蛍光,走査プローブ顕微鏡,マイクロ・ナノデバイス