ゲルマニウム基板上の極薄・高濃度リンドナー活性層の作製と評価(本文)

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Material Type: 博士論文
Title: ゲルマニウム基板上の極薄・高濃度リンドナー活性層の作製と評価(本文)
Author/Editor: 山田, 道洋
Author Heading: 山田, 道洋
Publication, Distribution, etc.: 慶應義塾大学大学院理工学研究科
Alternative Title: ゲルマニウムキバンジョウノゴクウス・コウノウドリンドナーカッセイソウノサクセイトヒョウカ (ホンブン)
Gerumaniumu kibanjo no gokuusu konodo rindona kasseiso no sakusei to hyoka (honbun)
Fabrication and characterization of ultra-thin, high concentration phosphorous donor layers on Ge substrates
Degree grantor/type: 慶應義塾大学
Date Granted: 2016-02-01
Dissertation Number: 甲第4360号
Degree Type: 博士(工学)
Text Language Code: jpn
Target Audience: 一般
Note (General): type:text
Source: fulltext
https://koara.lib.keio.ac.jp/xoonips/modules/xoonips/download.php?koara_id=KO50002002-20154360-0003
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 慶應義塾大学 : 慶應義塾大学学術情報リポジトリ