ゲルマニウム基板上の極薄・高濃度リンドナー活性層の作製と評価(本文)
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- Material Type
- 博士論文
- Author/Editor
- 山田, 道洋
- Author Heading
- Publication, Distribution, etc.
- Alternative Title
- ゲルマニウム キバンジョウ ノ ゴクウス・コウノウド リンドナー カッセイソウ ノ サクセイ ト ヒョウカ (ホンブン)Gerumaniumu kibanjo no gokuusu konodo rindona kasseiso no sakusei to hyoka (honbun)Fabrication and characterization of ultra-thin, high concentration phosphorous donor layers on Ge substrates
- Degree grantor/type
- 慶應義塾大学
- Date Granted
- 2016-02-01
- Dissertation Number
- 甲第4360号
- Degree Type
- 博士(工学)