電子基板上の部品群の高精度3次元形状計測技術の開発

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Author: 安達, 正明ほか

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Publication date: 2015-09-15

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Note (General)：: 金沢大学理工学域機械工学系電子基板に対して波長可変レーザー光を照射し，スペックル干渉計を通して多数の干渉像を取込み，微小振動が残る環境下でも３次元形状を計測できる方法を開発した．ランダム振動環境下で干渉像を多数枚取り込むと，画像間の位相シフト量はランダムな変化となる．画像内の異なる２画素における光強...

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https://kaken.nii.ac.jp/search/?qm=50212519

https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-24560289/

https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-24560289/24560289seika/

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Material Type: 文書・図像類
Title: 電子基板上の部品群の高精度3次元形状計測技術の開発
Author/Editor: 安達, 正明
Adachi, Masaaki
Author Heading: 安達, 正明
Adachi, Masaaki
Publication Date: 2015-09-15
Publication Date (W3CDTF): 2015-09-15
Alternative Title: Development of 3D-shape measurement technique of an electronic substrate with electronic parts
Periodical title: 平成26(2014)年度科学研究費補助金基盤研究(C) 研究成果報告書 = 2014 Fiscal Year Final Research Report
No. or year of volume/issue: 2012-04-01 – 2015-03-31
Volume: 2012-04-01 – 2015-03-31
Pages: 6p.-
Text Language Code: jpn
Subject Heading: 3次元形状計測
スペックル干渉計
位相抽出
ランダム振動
波長可変レーザー
位相シフト
Target Audience: 一般
Note (General): 金沢大学理工学域機械工学系
電子基板に対して波長可変レーザー光を照射し，スペックル干渉計を通して多数の干渉像を取込み，微小振動が残る環境下でも３次元形状を計測できる方法を開発した．ランダム振動環境下で干渉像を多数枚取り込むと，画像間の位相シフト量はランダムな変化となる．画像内の異なる２画素における光強度の最大値・最小値を利用した２回規格化からこの位相シフト量を計算し，取り込んでいる光強度の変化から最小二乗近似で干渉像の位相値をカメラの全画素で計算する．実験ではレーザー波長を７種変えて全体で140枚の干渉像を取込み，６種の波長変更に伴う６種の位相変化分布から電子基板の３次元形状を計算した．
We have developed a 3D-shape measurement technique of an electronic substrate with electronic parts using a wavelength variable laser. In the technique many speckle interferograms are captured under small random vibrations in environment. These vibrations would make phase shifts between the captured interferograms random. Amounts of these shifts are calculated through Max & Min light intensities searchings at two different pixels in frames and twin normalizations of their intensity changes. The calculated shifts and light-intensity changes at pixels are used to extract phase distribution with the Least-Squares Algorithm. During the laser wavelength is varied from 778.20nm to 780.28nm, 140 specklegrams are captured, and phase distributions are extracted regarding 7 different wavelengths. The ratios of phase change against wavelength change are extracted at all pixels of the frame. 3D shape is then calculated from the obtained ratios.
研究課題/領域番号:24560289, 研究期間(年度):2012-04-01 – 2015-03-31
DOI: 10.24517/00034457
Source: https://kanazawa-u.repo.nii.ac.jp/?action=repository_action_common_download&item_id=34470&item_no=1&attribute_id=26&file_no=1
https://kanazawa-u.repo.nii.ac.jp/?action=repository_action_common_download&item_id=34470&item_no=1&attribute_id=26&file_no=1
Access Restrictions: 限定公開
Rights (production): CC BY-NC-ND
Related Material: https://kaken.nii.ac.jp/search/?qm=50212519
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-24560289/
https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-24560289/24560289seika/
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 金沢大学 : 金沢大学学術情報リポジトリKURA