振動下でも使用できる超高精度3次元形状計測技術の開発

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Author: 安達, 正明ほか

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Publication date: 2012-04-04

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Note (General)：: 金沢大学理工研究域機械工学系振動下にある垂直走査型干渉計の光路差変化をレーザでリアルタイムかつ高速高精度に計測する手法を開発し,変化情報を基に一定の位相変化終了後毎にLED光を瞬間点灯させ干渉縞を撮影した.この手法で計測した形状結果を分析しさらなる高精度化には点灯 & 露光中に加わる振動もその影響を...

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https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21360115/

https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-21360115/21360115seika/

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Material Type: 文書・図像類
Title: 振動下でも使用できる超高精度3次元形状計測技術の開発
Author/Editor: 安達, 正明
Adachi, Masaaki
Author Heading: 安達, 正明
Adachi, Masaaki
Publication Date: 2012-04-04
Publication Date (W3CDTF): 2012-04-04
Alternative Title: Ultrahigh-precision 3D-shape measurement technique usable under vertical vibration
Periodical title: 平成23(2011)年度科学研究費補助金基盤研究(B) 研究成果報告書 = 2011 Fiscal Year Final Research Report
No. or year of volume/issue: 2009-2011
Volume: 2009-2011
Pages: 6p.-
Text Language Code: jpn
Subject Heading: 光干渉
3次元形状
位相抽出
振動
高精度計測
Target Audience: 一般
Note (General): 金沢大学理工研究域機械工学系
振動下にある垂直走査型干渉計の光路差変化をレーザでリアルタイムかつ高速高精度に計測する手法を開発し,変化情報を基に一定の位相変化終了後毎にLED光を瞬間点灯させ干渉縞を撮影した.この手法で計測した形状結果を分析しさらなる高精度化には点灯 & 露光中に加わる振動もその影響を補正する必要を見出し,露光中の光路差変化履歴を基に振動影響を補正して位相を抽出する方法も開発し,その効果を実験で確認した.
We have developed a new measurement technique for nm-level change of an optical-path-deference(OPD) using laser. This technique can measure OPD of a vertical-scan interference microscope real time and high speed. With the technique we can trigger LED flashings and interferogram exposures right after predefined phase changes even under vertical vibrations. Analyzing the measured 3D-shape obtained with the technique results in that affects of vibration during the exposure should be corrected for higher precision shape measurement. Then we have developed another technique which can extract interference phase just on the exposure-start moment from vibration-affected interferogram intensities and history of OPD changes during the exposure. Validity of the developed technique is proved by experiments using the vertical-scan interference microscope with intentionally generated pulse-like vibration.
研究課題/領域番号:21360115, 研究期間(年度):2009–2011
出典：研究課題「振動下でも使用できる超高精度3次元形状計測技術の開発」課題番号21360115（KAKEN：科学研究費助成事業データベース（国立情報学研究所））（https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-21360115/21360115seika/）を加工して作成
DOI: 10.24517/00034587
Source: https://kanazawa-u.repo.nii.ac.jp/?action=repository_action_common_download&item_id=34600&item_no=1&attribute_id=26&file_no=1
https://kanazawa-u.repo.nii.ac.jp/?action=repository_action_common_download&item_id=34600&item_no=1&attribute_id=26&file_no=1
Access Restrictions: 限定公開
Rights (production): CC BY-NC-ND
Related Material: https://kaken.nii.ac.jp/search/?qm=50212519
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21360115/
https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-21360115/21360115seika/
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 金沢大学 : 金沢大学学術情報リポジトリKURA