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三次元軸配向した多結晶シリコン薄膜の開発とその結晶成長メカニズムの解明

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三次元軸配向した多結晶シリコン薄膜の開発とその結晶成長メカニズムの解明

Material type
文書・図像類
Author
狄, 国慶ほか
Publisher
-
Publication date
2016-04-21
Material Format
Digital
Capacity, size, etc.
-
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Note (General)：

金沢大学自然科学研究科本研究は、無定形の石英基板上に堆積された多結晶シリコン薄膜における結晶粒がほぼ均一の大きさで三次元軸配向して成長することを本グループが初めて発見したことをきっかけに、その成長のメカニズムを明らかにする目的で、基板温度、ガスの圧力と流れ、そしてプラズマの役割などについてこの研究補...

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Digital

Material Type
文書・図像類
Title
三次元軸配向した多結晶シリコン薄膜の開発とその結晶成長メカニズムの解明
Author/Editor
狄, 国慶
Di, G.Q.
Author Heading
狄, 国慶
Di, G.Q.
Publication Date
2016-04-21
Publication Date (W3CDTF)
2016-04-21
Periodical title
平成7(1995)年度 科学研究費補助金 一般研究(C) 研究概要 = 1995 Research Project Summary
No. or year of volume/issue
1995
Volume
1995
Pages
2p.-