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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 肥後, 盛秀
- Author Heading
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- Alternative Title
- Development of Morphology Control of Aluminum Films by Vacuum Evaporation and Application to Various Functional Devices
- Text Language Code
- jpn
- Subject Heading
- Target Audience
- 一般
- Note (General)
- 2011-2013年度科学研究費助成事業（基盤研究（C））研究成果報告書 課題番号：23550100 研究代表者：肥後盛秀（鹿児島大学・理工学研究科・教授）真空蒸着法を用いて、電解コンデンサーや触媒などの機能素子のモデルとなる大きな表面積を持つアルミニウム薄膜を作製する新しい技術を開発した。460～520℃のアルミニウム基盤への蒸着により、孤立し直立した直径約1μmの円柱状の微細構造のアルミニウム薄膜を作製した。交流インピーダンス法を用いて電気二重層の容量を測定し平坦なアルミニウム基盤と比較したところ、表面積が約2.6倍増加していた。ガラス棒にアルミニウムを15nm蒸着し、波長400nmの発光ダイオードとフォトダイオードを用いる表面プラズモン共鳴センサーを用いて、エタノール添加ガソリン中のエタノール濃度の測定を行った。A new technique for preparing aluminum films having large surface areas and models for functional devices such as electrolytic capacitors or catalysts by vacuum evaporation was developed. The evaporation of aluminum onto heated aluminum substrates at temperatures between 460 and 520 degrees C gave the aluminum films having an isolated and columnar microstructure of standing grains with a diameter of about 1 micrometer. The comparison between the electric double-layer capacities of the aluminum films having the microstructure and the smooth aluminum substrates obtained from AC impedance measurements showed about a 2.6 times increase in the surface area. Concentrations of ethanol in gasoline were measured using an aluminum-deposited surface plasmon resonance-based glass rod sensor. The sensor has the evaporated aluminum film with a thickness of 15 nm and with a light-emitting diode at a wavelength of 400 nm and a photodiode.